Development of elastic polishing materials for the process of chemical-mechanical planarization

D. I. Terashkevich; E. S. Bokova; G. M. Kovalenko

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Terashkevich D.I., Bokova E.S., Kovalenko G.M. Development of elastic polishing materials for the process of chemical-mechanical planarization. Plasticheskie massy. 2023;(3-4):44-48. (In Russ.) https://doi.org/10.35164/0554-2901-2023-3-4-44-48

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ISSN 0554-2901 (Print)

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Plasticheskie massy

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