For citations:
Plotnikov D.S., Bokova E.S., Terashkevich D.I., Barashkova K.A., Evsyukova N.V., Zolina L.I. Comparative analysis of aqueous suspensions of cerium oxide and modifying additives for the process of chemical and mechanical planarization of plates with Shallow Trench Isolation. Plasticheskie massy. 2026;1(1):51-56. (In Russ.) https://doi.org/10.35164/0554-2901-2026-01-51-56
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