Microstructure analysis of polyurethane based polishing materials
https://doi.org/10.35164/0554-2901-2021-1-2-3-6
Abstract
This paper presents the results of porous structure analysis of polishing materials based on polyurethanes used in chemicalmechanical planarization process of IC layers.
About the Authors
D. I. Terashkevich
Russian State University named after A.N. Kosygin
Russian Federation
Russian Federation
Moscow
E. S. Bokova
Russian State University named after A.N. Kosygin
Russian Federation
Russian Federation
Moscow
A. S. Ginzburg
Russian State University named after A.N. Kosygin
Russian Federation
Russian Federation
Moscow
G. M. Kovalenko
Russian State University named after A.N. Kosygin
Russian Federation
Russian Federation
Moscow
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Review
For citations:
Terashkevich D.I., Bokova E.S., Ginzburg A.S., Kovalenko G.M. Microstructure analysis of polyurethane based polishing materials. Plasticheskie massy. 2021;(1-2):3-6. (In Russ.) https://doi.org/10.35164/0554-2901-2021-1-2-3-6
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